According to recent studies, although NF3 is not included within the list of greenhouse gasses, its effects as a greenhouse gas are much longer than other atmospheric gases as CO2 [1-3]. Aside from its application in semiconductor industry, as a substitute for other perfluorinated gases, it has been widely used in refrigeration industry. Therefore, its consumption in recent decade has increased rapidly. On the other hand, water vapour is the most important component of earth-atmosphere which is responsible for more than 60% of the natural greenhouse effect. Due to the its important role in many reaction cycles of atmospheric chemistry, in recent years, much research has been devoted to understanding the nature of the interactions between H2O and light molecules [4,5].The interactions between NF3 and different chemical species have been previously studied both computationally and experimentally [5,6]. However, its interaction with H2O molecules as the major component of the atmosphere has not been studied so far.
